Introduction to Micro and Nanofabrication

MSN 551 walks you through how micro- and nanoscale devices actually get built — the full toolkit of deposition, lithography, etching, doping, and the process integration logic that turns those steps into something like a CMOS transistor or a MEMS sensor. Most of your time goes into lab sessions on each major technique and a multi-week fabrication project where you design and justify a full process flow, alongside a midterm, quizzes, and a final. It's a graduate-level entry point for anyone heading into semiconductor devices, MEMS/NEMS, or photonics research, giving you the vocabulary and hands-on intuition to read cleanroom-based papers and start working in a fab.